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The FINEPLACER® positioning principle requires correct z arrangement of the contact surfaces to meet in the working plane. If substrates are clamped into the tracks of the air cushion table, the optimum z position of the substrate surface is given by the design. Clamping a heating plate into the tracks instead of a substrate for example puts this "in-herent" z adjustment out of action. To guarantee correct working height however, spacers may be used to lower the heating plate to as much as the thickness of the substrate.
A more practical solution is using the height adjustable tracks on the positioning table. They make adjustment much easier and more flexible by variation of the height z via the micrometer screw. This way, flip chip processes with different and frequently changing substrate thicknesses, as well as multi chip-on chip stacks can be done easily.
Retrofitting a positioning table with height adjustable tracks may require raising the pivot of the FINEPLACER® Base Module. In this case, specific information can be found in the manual. |