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Opto-bonder FEMTOZoom FINEPLACER® FEMTO

FINEPLACER® FEMTO
Automatic Sub Micron Opto-Bonder®

The brand new FINEPLACER® FEMTO provides auto-touchdown and die placement as well as controlled bonding operation after automatic alignment of die and substrate. FINEPLACER® FEMTO is an innovative opto-bonder that offers extreme modularity and flexibility. 

With a high placement accuracy of ±0.5 µm, FINEPLACER® FEMTO is the ideal choice for advanced placement and bonding of power laser, laser bars, assembly of opto-electronic components and more. This versatile system is capable of different bonding technologies, including flip chip (thermocompression, ultrasonic, AuSn and In), dispensing, UV curing, fluxing, ACF and ACP. The system works completely operator-independent - providing stability and increased process safety for production environments.

Applications:

Benefits:

  • Placement accuracy ± 0.5 µm
  • Automatic vision alignment system
  • User independent and reproducible processes
  • GUI based on WinXP
  • Compact ergonomic design
  • Small footprint optimized for clean rooms
  • Adaptable to specific applications and future technologies
  • Open system architecture
  • Designed for production and process & product development
  • Low cost of ownership 
Technical Specifications back to top  
 
Technical Specifications
Placement Accuracy
± 0.5 µm
Field of View (X)
0.25 mm - 2.92 mm
Die Size (max.)
100 mm x 100 mm
Substrate Size (max.)
500 mm x 300 mm
Placement Area
450 mm x 150 mm 
X-Travel / Resolution
450 mm / 0.1 µm
Y-Travel / Resolution
135 mm / 0.1 µm
Z-Travel / Resolution
10 mm / 0.2 µm
Theta Travel / Resolution
max. ± 9° / 0.2 m°
Bonding Force Module
 
     Bonding Force (min.)
0.2 N (0.1 N1
     Bonding Force (max.)
20 N (500 N1)
Heating Plate:
 
      Ramp Rate (max.)
20 K/s (100 K/s2
      Temperature (max.)
400°C (500°C2)
Footprint
1270 mm x 900 mm
1 different force ranges optionally available  2 optionally available 

 

Optional Features
High Speed Heating Plate
up to 100 K/s
   Heating Temperature
up to 500°C
   Uniformity of Heat Distribution
± 1%
Tip Tilt Adjustment
Integrated Dispense Unit
Die Pick-Up Module
Die Flip Module
Ultrasonic Module
Formic Acid/Inert Gas System
Inspection / Process Camera
Substrate Handling Module
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FINEPLACER® FEMTO
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Products | Micro Assembly Equipment | FINEPLACER® FEMTO (Opto_Bonder®)