Multi-chip, Multi-placement Die Bonder
The all new FineXT 6003 is a fully automatic large area die bonder with true multi-chip, multi placement capability for high volume manufacturing.
The modular design allows to configure the system for multiple advanced packaging technologies. The machine’s capabilities can be easily enhanced to adapt to new technological trends. Combined with an automatic material handling and tool management system, this ensures a high degree of process flexibility for next-generation optoelectronic and demanding fan-out applications.
In operation, a speed mode and a precision mode can be flexibly combined. Given the frequently changing precision requirements during the assembly of multi-chip modules, this capability ensures optimal throughput and makes the FineXT 6003 the perfect solution for modern semiconductor production environments.
- Placement accuracy of 3 µm
- Very large assembly area for PLP
- Multi chip capability
- Multi wafer capability
- Full process traceability and protocol function incl. photo capturing
- Operating software with full process access and easy programming
- High degree of process flexibility
- In-field retrofitting during the entire service life
- Plug & Play configuration of process modules
- Programmable speed/accuracy mode
- In-line capability
- Fully automatic material management
- Wide range of component presentations
Functions - Modules - Enhancements
Our solutions are as individual as our customers' requirements and offer a wide range of configuration options. In addition to the system's basic functions, which are part of the standard functional range, numerous process modules are available for each system. Retrofittable at any time, they enable additional bonding technologies and processes either directly or as part of a module package. A selection of functional enhancements and accessory systems make daily work with the machine easier and help to make certain technology and process sequences even more efficient.
Use different tools or tool tips, automatic exchange in process.
For automatic transport of substrates. Width-adjustable for various substrate dimensions.
Direct contact heating from the top with chip specific tool design to apply temperature from the chip side. E.g. used for thermocompression, gluing or ACA bonding
Ensures safe handling of components from GelPak®, VR trays, waffle packs or tape holders.
Used to pick up components directly from blue tape.
Used to flip components prior to face-down assembly.
Manual or motorized squeegee units for presentation of adhesives or flux, suitable for various sized die. Rotary and linear versions with adaptable layer thicknesses.
Motorized feed unit to move dispenser into working or parking position.
Various types of dispensing systems to apply flux, solder paste, adhesive or other material.
Used for die presentation. Supports 300 mm wafers, GelPak® and waffle packs.
Automatic substrate unloading from magazines / loading into magazines. Instead of I/O panel system
Automatic processing of large batches with a high number of individual substrates. Instead of I/O lift system
Creates an inert or reactive (H2N2) atmosphere in an enclosure. Used to prevent or reduce oxidation during soldering or bonding.
Accommodates 300 mm wafer cassettes. Programmable speed and slots.
Improve the wetting condition of bonding surfaces and reduces voids. Oxide layers are scrubbed off in a low frequency mechanical sonic process.
Various direct contact heating options to heat up substrates from the bottom during the process. Substrate-specific fixations available. Optionally with process gas integration. Used e.g. for thermocompression, gluing or thermosonic bonding
Unheated support plate with substrate specific fixation (e.g. vacuum) to clamp various substrates.
Provides ultra violet light in various wave length for adhesive processes without thermal influence.
Special substrate heating module designed for large wafers. Very uniform heat distribution during chip to wafer or wafer to wafer bonding.